The Linear Drive with Adjustable Flange is based on the standard LTM series and integrates an adjustable flange to allow tilt within ±3° for final alignment, useful for beamline calibration diagnostics or ion/sputter source calibration, etc. Adjustment is achieved by three screws. This series of adjustable flanges are equipped with corresponding bolt holes on the basis of standard flanges.
The standard configuration is manual drive, if you need motor drive, please contact us.
● Working Pressure: 10-11mbar~1bar
● Bakeable to 150°C
● Welded Bellows Seal with SS 316
● Tapped Flanges on Both Sides
● Angular tilt: ±3°
● Etched Scale in 1mm Increments