The high-precision full-size three-dimensional translation stage allows the welding bellows to move in the three directions of X, Y, and Z. Adopts linear guide structure and high-precision ball screw, the structure is strong and compact. With servo motor and grating scale, it can achieve sub-micron precision and can also be used with a high-precision DPRF offering a 4th axis of rotation. The product is modular with multiple configurations to choose from

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Clear Bore up to φ102
Up to 650mm Z travel, +/-12.5mm XY travel (custom options on request)
CF100 travel and CF152 mounting flanges
Servo motor with optical encoder for high precision positioning
Resolution of 0.2μm for X, Y & Z axes