Integrated Solutions for Growth.

The UHV distribution chamber incorporates a rotary, telescopic transfer arm capable of feeding samples from one chamber to another. It is compact, cost effective and can be coupled to the reputable Vinci Linear Transfer Tunnel. Bare 3” wafers can be thus loaded in the linear tunnel and distributed to any growth or analysis system within the user facility. Vinci offers a turnkey solution to Institutes who wish to develop novel materials for the future with a budget smart and space optimised integration.

Feature:
*Rotary & Telescopic Extension

The ability to grow, control, manipulate and design materials from the atomic/nano-level via microstructure to macrostructure levels is a major driver both for fundamental research and applied technology in the Thin Films. The MECATRANS allows for the combination of deposition, analysis and post deposition treatment techniques, all connected under Ultra High Vacuum (UHV).

Various materials require different deposition processes in order to create multi-material devices. Therefore, as-deposited samples are easily transportable under a controlled environment with a base pressure of 1.10-10 Torr, which protects them from oxidation and other structural or chemical changes related to atmospheric exposure.

By combining several growth, deposition and analysis techniques, the MECATRANS permits the exploration of a large range of more complex and hybrid systems for materials control at the atomic scale.

The MECATRANS is a stainless steel tunnel with an internal monorail upon which substrate train is moveable.

The samples are transported through the UHV tube on this monorail train. By means of transfer rods, the samples can be exchanged between the train and the connected chambers. The MECATRANS accommodates for a 12 two-inch sample holder on the internal monorail .

To avoid any contamination between chambers and/or vibration conduction each UHV chamber is isolated by a UHV valve and features specific components.

The Portable UHV Suitcase has been developed to conveniently and safely transport samples in a UHV environment. The system is leak tested and baked to UHV standard before shipping, so it is ready to use out-of-the-box.

* Compact design reduces total weight while retaining complete functionality.

* Connects to other systems via a VAT NW40CF Manual Gate Valve and transfers sample holders via a magnetic transfer arm.

* UHV compatible viewports make it possible to monitor samples even when in transit.

* The provided pump (Ion/NEG) keeps the inner volume constant in UHV environment even at the shortage of power, so is an ideal tool for carrying sensitive samples for remote instruments.

* Base pressure is below <1 x 10-10 mbar for 48 hours after complete bakeout.