The bellows rotary drive adopts welded stainless steel bellows seal, and uses a unique off-axis swing design, combined with the characteristics of the bearing support of the rotating shaft, so that it operates smoothly and has a long service life. Through the CF flange, it can be connected with other equipment.
Optional stepper motor drive, in which the motor control part needs to be purchased separately.
The bellows rotary drive has high precision and is suitable for high precision applications such as sample holders.

● Welded stainless steel bellows Sealed

● UHV Rated to 10-11 mbar

● Bakeable to 150℃

● Laser Etched Scale in 1° Increments

● Rotation range: 360° continuous

● Mounting flange: Clear hole

The bellows rotary drive adopts welded stainless steel bellows seal, and uses a unique off-axis swing design, combined with the characteristics of the bearing support of the rotating shaft, so that it operates smoothly and has a long service life. Through the CF flange, it can be connected with other equipment.
Optional stepper motor drive, in which the motor control part needs to be purchased separately.
The bellows rotary drive has high precision and is suitable for high precision applications such as sample holders.

● Welded stainless steel bellows Sealed

● UHV Rated to 10-11 mbar

● Bakeable to 150℃

● Laser Etched Scale in 1° Increments

● Rotation range: 360° continuous

● Mounting flange: Clear hole

The bellows rotary drive adopts welded stainless steel bellows seal, and uses a unique off-axis swing design, combined with the characteristics of the bearing support of the rotating shaft, so that it operates smoothly and has a long service life. Through the CF flange, it can be connected with other equipment.
Optional stepper motor drive, in which the motor control part needs to be purchased separately.
The bellows rotary drive has high precision and is suitable for high precision applications such as sample holders.

● Welded stainless steel bellows Sealed

● UHV Rated to 10-11 mbar

● Bakeable to 150℃

● Laser Etched Scale in 1° Increments

● Rotation range: 360° continuous

● Mounting flange: Clear hole

The compact differential rotary drive adopts side sealing, which is more compact, and can still meet the requirements of ultra-high vacuum applications, providing basic rotary motion for components, and realizing 360° continuous rotation, which is suitable for some occasions with limited size.

Differential rotational drives can be applied to sample surface analysis (XPS, AES or SIMS), ion/neutron/atom scattering experiments, etc.

● Manual/ Step Motor Actuator
● Cross Roller Bearings
● Bakeable to 150℃
● Rotation range: 360° continuous
● One stage Differential pumping for UHV Performance
● Mounting flange on both sides: CF flange, tapped hole

The compact differential rotary drive adopts side sealing, which is more compact, and can still meet the requirements of ultra-high vacuum applications, providing basic rotary motion for components, and realizing 360° continuous rotation, which is suitable for some occasions with limited size.

Differential rotational drives can be applied to sample surface analysis (XPS, AES or SIMS), ion/neutron/atom scattering experiments, etc.

● Manual/ Step Motor Actuator
● Cross Roller Bearings
● Bakeable to 150℃
● Rotation range: 360° continuous
● One stage Differential pumping for UHV Performance
● Mounting flange on both sides: CF flange, tapped hole

The compact differential rotary drive adopts side sealing, which is more compact, and can still meet the requirements of ultra-high vacuum applications, providing basic rotary motion for components, and realizing 360° continuous rotation, which is suitable for some occasions with limited size.

Differential rotational drives can be applied to sample surface analysis (XPS, AES or SIMS), ion/neutron/atom scattering experiments, etc.

● Manual/ Step Motor Actuator
● Cross Roller Bearings
● Bakeable to 150℃
● Rotation range: 360° continuous
● One stage Differential pumping for UHV Performance
● Mounting flange on both sides: CF flange, tapped hole

The compact differential rotary drive adopts side sealing, which is more compact, and can still meet the requirements of ultra-high vacuum applications, providing basic rotary motion for components, and realizing 360° continuous rotation, which is suitable for some occasions with limited size.

Differential rotational drives can be applied to sample surface analysis (XPS, AES or SIMS), ion/neutron/atom scattering experiments, etc.

● Manual/ Step Motor Actuator
● Cross Roller Bearings
● Bakeable to 150℃
● Rotation range: 360° continuous
● One stage Differential pumping for UHV Performance
● Mounting flange on both sides: CF flange, tapped hole

The compact differential rotary drive adopts side sealing, which is more compact, and can still meet the requirements of ultra-high vacuum applications, providing basic rotary motion for components, and realizing 360° continuous rotation, which is suitable for some occasions with limited size.

Differential rotational drives can be applied to sample surface analysis (XPS, AES or SIMS), ion/neutron/atom scattering experiments, etc.

● Manual/ Step Motor Actuator
● Cross Roller Bearings
● Bakeable to 150℃
● Rotation range: 360° continuous
● One stage Differential pumping for UHV Performance
● Mounting flange on both sides: CF flange, tapped hole

The full-size three-dimensional translation stage (cross rollers) has high maneuverability and can move the welded bellows in three directions of X, Y, and Z. X/Y direction adopts crossed roller and ball screw structure, which is strong and compact. The Z direction adopts the combined structure of the optical axis and the ball screw. The product is a modular product with multiple configurations to choose from.
Welcome to call for more information.

The differential rotary drive allows two flanges to rotate relative to each other coaxially, and can be used as a modular component to build an ultra-high vacuum multi-axis manipulation mechanism, providing basic rotary motion for the assembly and enabling 360° continuous rotation.
Differential rotational drives can be applied to sample surface analysis (XPS, AES or SIMS), ion/neutron/atom scattering experiments, etc.

● Manual/ Step Motor Actuator
● Precision Ball Bearings and Quality PTFE
● Rotation range: 360° continuous
● Bakeable to 150℃
● Laser Etched Scale in 1° Increments
● Two Stage Differential Pumping for UHV Performance
● Mounting flange on both sides: CF flange, tapped hole

The differential rotary drive allows two flanges to rotate relative to each other coaxially, and can be used as a modular component to build an ultra-high vacuum multi-axis manipulation mechanism, providing basic rotary motion for the assembly and enabling 360° continuous rotation.
Differential rotational drives can be applied to sample surface analysis (XPS, AES or SIMS), ion/neutron/atom scattering experiments, etc.

● Manual/ Step Motor Actuator
● Precision Ball Bearings and Quality PTFE
● Rotation range: 360° continuous
● Bakeable to 150℃
● Laser Etched Scale in 1° Increments
● Two Stage Differential Pumping for UHV Performance
● Mounting flange on both sides: CF flange, tapped hole

The differential rotary drive allows two flanges to rotate relative to each other coaxially, and can be used as a modular component to build an ultra-high vacuum multi-axis manipulation mechanism, providing basic rotary motion for the assembly and enabling 360° continuous rotation.
Differential rotational drives can be applied to sample surface analysis (XPS, AES or SIMS), ion/neutron/atom scattering experiments, etc.

● Manual/ Step Motor Actuator
● Precision Ball Bearings and Quality PTFE
● Rotation range: 360° continuous
● Bakeable to 150℃
● Laser Etched Scale in 1° Increments
● Two Stage Differential Pumping for UHV Performance
● Mounting flange on both sides: CF flange, tapped hole

The differential rotary drive allows two flanges to rotate relative to each other coaxially, and can be used as a modular component to build an ultra-high vacuum multi-axis manipulation mechanism, providing basic rotary motion for the assembly and enabling 360° continuous rotation.
Differential rotational drives can be applied to sample surface analysis (XPS, AES or SIMS), ion/neutron/atom scattering experiments, etc.

● Manual/ Step Motor Actuator
● Precision Ball Bearings and Quality PTFE
● Rotation range: 360° continuous
● Bakeable to 150℃
● Laser Etched Scale in 1° Increments
● Two Stage Differential Pumping for UHV Performance
● Mounting flange on both sides: CF flange, tapped hole

High-precision differential rotary drives by using crossed roller bearings, the accuracy and stiffness of rotary drives can be greatly improved. The product structure has a complete inner and outer ring, and the bearing can be directly mounted on the rotating fixed end without any fixing plate and housing. Therefore, while maintaining the distance between the rotary drive rotating body and the fixed flange, it is possible to increase the bearing thickness or the size of the rolling elements in the bearing, and the performance is almost completely unaffected by the bearing installation. This allows a photoelectric encoder to be installed in the compact ultra-high vacuum rotary drive, using a servo motor to drive the worm gear and a precise rotary encoder for position feedback, making the compact ultra-high vacuum rotary drive with high precision. Larger balls increase the rigidity of the UHV rotary drive.

● Servo motor driver
● High-precision Crossed Roller Bearings
● Rotation range: ±175°
● Carry heavy loads: >2000kg
● optical encoder, resolution: ≤0.0001°
● One stage differential pumping for UHV Performance
● Mounting flange on both sides: CF flange, tapped hole

The high-precision full-size three-dimensional translation stage allows the welding bellows to move in the three directions of X, Y, and Z. Adopts linear guide structure and high-precision ball screw, the structure is strong and compact. With servo motor and grating scale, it can achieve sub-micron precision and can also be used with a high-precision DPRF offering a 4th axis of rotation. The product is modular with multiple configurations to choose from

Please contact us for further information and pricing.

 

Clear Bore up to φ102
Up to 650mm Z travel, +/-12.5mm XY travel (custom options on request)
CF100 travel and CF152 mounting flanges
Servo motor with optical encoder for high precision positioning
Resolution of 0.2μm for X, Y & Z axes

The hollow magnetic coupling rotary drive has a rotatable inner hollow shaft with a CF flange structure at both ends that allows electrical, fluid or other motion to pass through the drive.
This rotary drive product can withstand loads of a certain weight.

● Magnetic Coupling
● UHV Rated to 10-11 mbar
● Bakeable to 150℃
● Rotation range: 360° continuous
● Laser Etched Scale in 1° Increments
● UHV Compatible materials
● No backlash under low load
● Top mounting flange: CF flange, tapped hole
● Bottom mounting flange: CF flange, clear hole

The hollow magnetic coupling rotary drive has a rotatable inner hollow shaft with a CF flange structure at both ends that allows electrical, fluid or other motion to pass through the drive.
This rotary drive product can withstand loads of a certain weight.

● Magnetic Coupling
● UHV Rated to 10-11 mbar
● Bakeable to 150℃
● Rotation range: 360° continuous
● Laser Etched Scale in 1° Increments
● UHV Compatible materials
● No backlash under low load
● Top mounting flange: CF flange, tapped hole
● Bottom mounting flange: CF flange, clear hole

The hollow magnetic coupling rotary drive has a rotatable inner hollow shaft with a CF flange structure at both ends that allows electrical, fluid or other motion to pass through the drive.
This rotary drive product can withstand loads of a certain weight.

● Magnetic Coupling
● UHV Rated to 10-11 mbar
● Bakeable to 150℃
● Rotation range: 360° continuous
● Laser Etched Scale in 1° Increments
● UHV Compatible materials
● No backlash under low load
● Top mounting flange: CF flange, tapped hole
● Bottom mounting flange: CF flange, clear hole

The hollow magnetic coupling rotary drive has a rotatable inner hollow shaft with a CF flange structure at both ends that allows electrical, fluid or other motion to pass through the drive.
This rotary drive product can withstand loads of a certain weight.

● Magnetic Coupling
● UHV Rated to 10-11 mbar
● Bakeable to 150℃
● Rotation range: 360° continuous
● Laser Etched Scale in 1° Increments
● UHV Compatible materials
● No backlash under low load
● Top mounting flange: CF flange, tapped hole
● Bottom mounting flange: CF flange, clear hole

The backplane linear drive is supported by an aluminum plate frame with sufficient stability and accuracy to carry heavy components in ultra-vacuum environments.
This product has a variety of stroke options, and can choose manual or electric drive.

● Working Pressure: 10-11 mbar~1 bar
● Bakeable to 150℃
● Welded Bellows Seal with SS 316
● Top mounting flange: CF flange, tapped hole
● Bottom mounting flange: CF flange, clear hole
● Mounted in any orientation
● Etched Scale in 1 mm Increments