The hollow magnetic coupling rotary drive has a rotatable inner hollow shaft with a CF flange structure at both ends that allows electrical, fluid or other motion to pass through the drive.
This rotary drive product can withstand loads of a certain weight.

● Magnetic Coupling
● UHV Rated to 10-11 mbar
● Bakeable to 150℃
● Rotation range: 360° continuous
● Laser Etched Scale in 1° Increments
● UHV Compatible materials
● No backlash under low load
● Top mounting flange: CF flange, tapped hole
● Bottom mounting flange: CF flange, clear hole

The hollow magnetic coupling rotary drive has a rotatable inner hollow shaft with a CF flange structure at both ends that allows electrical, fluid or other motion to pass through the drive.
This rotary drive product can withstand loads of a certain weight.

● Magnetic Coupling
● UHV Rated to 10-11 mbar
● Bakeable to 150℃
● Rotation range: 360° continuous
● Laser Etched Scale in 1° Increments
● UHV Compatible materials
● No backlash under low load
● Top mounting flange: CF flange, tapped hole
● Bottom mounting flange: CF flange, clear hole

The backplane linear drive is supported by an aluminum plate frame with sufficient stability and accuracy to carry heavy components in ultra-vacuum environments.
This product has a variety of stroke options, and can choose manual or electric drive.

● Working Pressure: 10-11 mbar~1 bar
● Bakeable to 150℃
● Welded Bellows Seal with SS 316
● Top mounting flange: CF flange, tapped hole
● Bottom mounting flange: CF flange, clear hole
● Mounted in any orientation
● Etched Scale in 1 mm Increments

The backplane linear drive is supported by an aluminum plate frame with sufficient stability and accuracy to carry heavy components in ultra-vacuum environments.
This product has a variety of stroke options, and can choose manual or electric drive.

● Working Pressure: 10-11 mbar~1 bar
● Bakeable to 150℃
● Welded Bellows Seal with SS 316
● Top mounting flange: CF flange, tapped hole
● Bottom mounting flange: CF flange, clear hole
● Mounted in any orientation
● Etched Scale in 1 mm Increments

The backplane linear drive is supported by an aluminum plate frame with sufficient stability and accuracy to carry heavy components in ultra-vacuum environments.
This product has a variety of stroke options, and can choose manual or electric drive.

● Working Pressure: 10-11 mbar~1 bar
● Bakeable to 150℃
● Welded Bellows Seal with SS 316
● Top mounting flange: CF flange, tapped hole
● Bottom mounting flange: CF flange, clear hole
● Mounted in any orientation
● Etched Scale in 1 mm Increments

The backplane linear drive is supported by an aluminum plate frame with sufficient stability and accuracy to carry heavy components in ultra-vacuum environments.
This product has a variety of stroke options, and can choose manual or electric drive.

● Working Pressure: 10-11 mbar~1 bar
● Bakeable to 150℃
● Welded Bellows Seal with SS 316
● Top mounting flange: CF flange, tapped hole
● Bottom mounting flange: CF flange, clear hole
● Mounted in any orientation
● Etched Scale in 1 mm Increments

The backplane linear drive is supported by an aluminum plate frame with sufficient stability and accuracy to carry heavy components in ultra-vacuum environments.
This product has a variety of stroke options, and can choose manual or electric drive.

●  Working Pressure: 10-11 mbar~1 bar
●  Bakeable to 150℃
●  Welded Bellows Seal with SS 316
●  Top mounting flange: CF flange, tapped hole
●  Bottom mounting flange: CF flange, clear hole
●  Mounted in any orientation
●  Etched Scale in 1 mm Increments

The backplane linear drive is supported by an aluminum plate frame with sufficient stability and accuracy to carry heavy components in ultra-vacuum environments.
This product has a variety of stroke options, and can choose manual or electric drive.

●  Working Pressure: 10-11 mbar~1 bar
●  Bakeable to 150℃
●  Welded Bellows Seal with SS 316
●  Top mounting flange: CF flange, tapped hole
●  Bottom mounting flange: CF flange, clear hole
●  Mounted in any orientation
●  Etched Scale in 1 mm Increments

The backplane linear drive is supported by an aluminum plate frame with sufficient stability and accuracy to carry heavy components in ultra-vacuum environments.
This product has a variety of stroke options, and can choose manual or electric drive.

● Working Pressure: 10-11 mbar~1 bar
● Bakeable to 150℃
● Welded Bellows Seal with SS 316
● Top mounting flange: CF flange, tapped hole
● Bottom mounting flange: CF flange, clear hole
● Mounted in any orientation
● Etched Scale in 1 mm Increments

The backplane linear drive is supported by an aluminum plate frame with sufficient stability and accuracy to carry heavy components in ultra-vacuum environments.
This product has a variety of stroke options, and can choose manual or electric drive.

●  Working Pressure: 10-11 mbar~1 bar
●  Bakeable to 150℃
●  Welded Bellows Seal with SS 316
●  Top mounting flange: CF flange, tapped hole
●  Bottom mounting flange: CF flange, clear hole
●  Mounted in any orientation
●  Etched Scale in 1 mm Increments

The backplane linear drive is supported by an aluminum plate frame with sufficient stability and accuracy to carry heavy components in ultra-vacuum environments.
This product has a variety of stroke options, and can choose manual or electric drive.

● Working Pressure: 10-11 mbar~1 bar
● Bakeable to 150℃
● Welded Bellows Seal with SS 316
● Top mounting flange: CF flange, tapped hole
● Bottom mounting flange: CF flange, clear hole
● Mounted in any orientation
● Etched Scale in 1 mm Increments

The backplane linear drive is supported by an aluminum plate frame with sufficient stability and accuracy to carry heavy components in ultra-vacuum environments.
This product has a variety of stroke options, and can choose manual or electric drive.

● Working Pressure: 10-11 mbar~1 bar
● Bakeable to 150℃
● Welded Bellows Seal with SS 316
● Top mounting flange: CF flange, tapped hole
● Bottom mounting flange: CF flange, clear hole
● Mounted in any orientation
● Etched Scale in 1 mm Increments

The Linear Drive with Adjustable Flange is based on the standard LTM series and integrates an adjustable flange to allow tilt within ±3° for final alignment, useful for beamline calibration diagnostics or ion/sputter source calibration, etc. Adjustment is achieved by three screws. This series of adjustable flanges are equipped with corresponding bolt holes on the basis of standard flanges.
The standard configuration is manual drive, if you need motor drive, please contact us.

● Working Pressure: 10-11mbar~1bar
● Bakeable to 150°C
● Welded Bellows Seal with SS 316
● Tapped Flanges on Both Sides
● Angular tilt: ±3°
● Etched Scale in 1mm Increments

The Linear Drive with Adjustable Flange is based on the standard LTM series and integrates an adjustable flange to allow tilt within ±3° for final alignment, useful for beamline calibration diagnostics or ion/sputter source calibration, etc. Adjustment is achieved by three screws. This series of adjustable flanges are equipped with corresponding bolt holes on the basis of standard flanges.
The standard configuration is manual drive, if you need motor drive, please contact us.

● Working Pressure: 10-11mbar~1bar
● Bakeable to 150°C
● Welded Bellows Seal with SS 316
● Tapped Flanges on Both Sides
● Angular tilt: ±3°
● Etched Scale in 1mm Increments

The Linear Drive with Adjustable Flange is based on the standard LTM series and integrates an adjustable flange to allow tilt within ±3° for final alignment, useful for beamline calibration diagnostics or ion/sputter source calibration, etc. Adjustment is achieved by three screws. This series of adjustable flanges are equipped with corresponding bolt holes on the basis of standard flanges.
The standard configuration is manual drive, if you need motor drive, please contact us.

● Working Pressure: 10-11mbar~1bar
● Bakeable to 150°C
● Welded Bellows Seal with SS 316
● Tapped Flanges on Both Sides
● Angular tilt: ±3°
● Etched Scale in 1mm Increments

Linear drive with adjustable flange back plate, integrated adjustable flange and aluminum plate frame support, both stability and accuracy, moving flange end allows ±3° deflection, can carry heavy parts in ultra-high vacuum environment of transportation.
This product has a variety of stroke options, manual drive or electric drive, and can be customized.

● Working Pressure: 10-11 mbar~1 bar
● Bakeable to 150℃
● Welded Bellows Seal with SS 316
● Angular tilt: ±3°
● Top mounting flange: CF flange, tapped hole
● Etched Scale in 1 mm Increments

Linear drive with adjustable flange back plate, integrated adjustable flange and aluminum plate frame support, both stability and accuracy, moving flange end allows ±3° deflection, can carry heavy parts in ultra-high vacuum environment of transportation.
This product has a variety of stroke options, manual drive or electric drive, and can be customized.

● Working Pressure: 10-11 mbar~1 bar
● Bakeable to 150℃
● Welded Bellows Seal with SS 316
● Angular tilt: ±3°
● Top mounting flange: CF flange, tapped hole
● Etched Scale in 1 mm Increments

Linear drive with adjustable flange back plate, integrated adjustable flange and aluminum plate frame support, both stability and accuracy, moving flange end allows ±3° deflection, can carry heavy parts in ultra-high vacuum environment of transportation.
This product has a variety of stroke options, manual drive or electric drive, and can be customized.

● Working Pressure: 10-11 mbar~1 bar
● Bakeable to 150℃
● Welded Bellows Seal with SS 316
● Angular tilt: ±3°
● Top mounting flange: CF flange, tapped hole
● Etched Scale in 1 mm Increments

Linear drive with adjustable flange back plate, integrated adjustable flange and aluminum plate frame support, both stability and accuracy, moving flange end allows ±3° deflection, can carry heavy parts in ultra-high vacuum environment of transportation.
This product has a variety of stroke options, manual drive or electric drive, and can be customized.

● Working Pressure: 10-11 mbar~1 bar
● Bakeable to 150℃
● Welded Bellows Seal with SS 316
● Angular tilt: ±3°
● Top mounting flange: CF flange, tapped hole
● Etched Scale in 1 mm Increments

Linear drive with adjustable flange back plate, integrated adjustable flange and aluminum plate frame support, both stability and accuracy, moving flange end allows ±3° deflection, can carry heavy parts in ultra-high vacuum environment of transportation.
This product has a variety of stroke options, manual drive or electric drive, and can be customized.

● Working Pressure: 10-11 mbar~1 bar
● Bakeable to 150℃
● Welded Bellows Seal with SS 316
● Angular tilt: ±3°
● Top mounting flange: CF flange, tapped hole
● Etched Scale in 1 mm Increments