UHV Distribution Chambers

Integrated Solutions for Growth


VINCI TECHNOLOGY has been designing smart, state of the art solutions for Ultra-High Vacuum applications for over 35 years. The UHV distribution chamber incorporates a rotary, telescopic transfer arm capable of feeding samples from one chamber to another. It is compact, cost effective and can be coupled to the reputable Vinci Linear Transfer Tunnel. Bare 3” wafers can be thus loaded in the linear tunnel and distributed to any growth or analysis system within the user facility. Vinci offers a turnkey solution to Institutes who wish to develop novel materials for the future with a budget smart and space optimized integration.

Get In Touch Today

Get in touch today to discuss your requirements, please contact us on

+44 (0) 1424 447726   sales@ultrahighvacuum.com

Rotary & Telescopic Extension

ModelInformation
Mounting FlangeCF 100
Rotation motionUnlimited manual and
+/- 180° motorised
Chamber ID650mm
Chamber height288mm
Volume of chamber65L
Arm extension760mm
Arm stiffness at full extensionTypically <1mm deflection for 10N load
Rotational reproducibility0.2mm at full extension
Bakeout temperature250°C (with motors removed)
Base pressure5 E 10-10 mbar
CompatibilityMecatrans


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