UHV Distribution Chambers
Integrated Solutions for Growth
VINCI TECHNOLOGY has been designing smart, state of the art solutions for Ultra-High Vacuum applications for over 35 years. The UHV distribution chamber incorporates a rotary, telescopic transfer arm capable of feeding samples from one chamber to another. It is compact, cost effective and can be coupled to the reputable Vinci Linear Transfer Tunnel. Bare 3” wafers can be thus loaded in the linear tunnel and distributed to any growth or analysis system within the user facility. Vinci offers a turnkey solution to Institutes who wish to develop novel materials for the future with a budget smart and space optimized integration.
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Get in touch today to discuss your requirements, please contact us on
+44 (0) 1424 447726 sales@ultrahighvacuum.com
Rotary & Telescopic Extension
Model | Information |
---|---|
Mounting Flange | CF 100 |
Rotation motion | Unlimited manual and +/- 180° motorised |
Chamber ID | 650mm |
Chamber height | 288mm |
Volume of chamber | 65L |
Arm extension | 760mm |
Arm stiffness at full extension | Typically <1mm deflection for 10N load |
Rotational reproducibility | 0.2mm at full extension |
Bakeout temperature | 250°C (with motors removed) |
Base pressure | 5 E 10-10 mbar |
Compatibility | Mecatrans |
Express delivery for the UK & Europe
Excellent customer care guaranteed
ISO 9001 approved company
Highest quality & performance assured