Core System Features

• Base Pressure 5 E 10-11 mbar
• LN2 cryo shrouds
• 2” molybloc sample puck or 3’’ bare wafer
• Up to 6 Knudsen cells (35 cc)
• Up to 3 cracker cells
• 6 x 7 cc (or 4 x 15) linear E-beam
• Pumping groups: TSP Ion Pump, Cryo or Turbomolecular Pumping
• Heating &/or cooling sample stages
• Growth feedback via flux gauge, quartz monitors
• Integrated RHEED or RHEED AUGERS

• Couples with Transfer tunnel, Load locks & Preparation chambers
  

Couples with

• Storage – Base Pressure 2. 10-10 mbar
• Atm Load Lock – Base Pressure 5. 10-8 mbar
• Annealing chambers
• Out-gasing chambers
• Multiple cassette storge
• Link with MECATRANS transfer tunnel or Cluster chamber
• Optimized to fit customer lab space