Product Range

Full-scale XYZ Stage (crossed roller bearings) Z-axis 200mm Travel.
SKU: CFXYZ150Z200M-1083
XY +/-12.5mm Travel, Travelling Flange 152mm OD, Base Flange 203mm OD, 102mm Clear Bellows Bore, All Axes Motorised.

The full-size three-dimensional translation stage offers high precision in three directions of X, Y, and Z. X/Y direction adopts a crossed-roller bearing structure, which is strong and compact, whilst the Z direction adopts a combination of plain shaft and ball screw.

Full-scale XYZ stages are modular offering a wide range of configurations and accessories.
Full-scale XYZ Stage (crossed roller bearings) Z-axis 350mm Travel
SKU: CFXYZ150Z350M-1083
XY +/-12.5mm Travel, Travelling Flange 152mm OD, Base Flange 203mm OD, 102mm Clear Bellows Bore, All axes motorised.

The full-size three-dimensional translation stage (cross rollers) has high manoeuvrability and can move the welded bellows in three directions of X, Y, and Z.

• X/Y direction adopts crossed roller and ball screw structure, which is strong and compact.
• The Z direction adopts the combined structure of the optical axis and the ball screw.
Full-scale XYZ Stage (crossed roller bearings) Z-axis 500mm Travel
SKU: CFXYZ150Z500M-1083
XY +/-12.5mm Travel, Travelling Flange 152mm OD, Base Flange 203mm OD, 102mm Clear Bellows Bore, All axes motorised.

The full-size three-dimensional translation stage (cross rollers) has high manoeuvrability and can move the welded bellows in three directions of X, Y, and Z.

• X/Y direction adopts crossed roller and ball screw structure, which is strong and compact.
• Z direction adopts the combined structure of the optical axis and the ball screw.
Full-scale XYZ Stage (crossed roller bearings) Z-axis 650mm Travel
SKU: CFXYZ150Z650M-1083
XY +/-12.5mm Travel, Travelling Flange 152mm OD, Base Flange 203mm OD, 102mm Clear Bellows Bore, All axes motorised.

The full-size three-dimensional translation stage (cross rollers) has high manoeuvrability and can move the welded bellows in three directions of X, Y, and Z.

• X/Y direction adopts crossed roller and ball screw structure, which is strong and compact.
• The Z direction adopts the combined structure of the optical axis and the ball screw.
High-precision Full-scale XYZ Stage, Upto 650mm Z Travel, +/-12.5mm XY Travel, 102mm Clear Bore, CF152 Travelling Flange, CF203 Mounting Flange
SKU: HFXYZ150Z100M-1055
The high-precision full-size three-dimensional translation stage allows the welding bellows to move in the three directions of X, Y, and Z. Adopts linear guide structure and high-precision ball screw, the structure is strong and compact. With servo motor and grating scale, it can achieve sub-micron precision and can also be used with a high-precision DPRF offering a 4th axis of rotation. The product is modular with multiple configurations to choose from.

Please contact us for further information and pricing.

• Clear Bore up to φ102
• Up to 650mm Z travel, +/-12.5mm XY travel (custom options on request)
• CF100 travel and CF152 mounting flanges
• Servo motor with optical encoder for high precision positioning
• Resolution of 0.2μm for X, Y and Z axes
Medium XYZ Stage, Upto 200mm Z Travel, +/-7.5mm XY Travel, 65mm Clear Bore, CF114 Travelling & Mounting Flanges
SKU: MXYZ63Z100S-0108
The medium-sized three-dimensional translation stage has high maneuverability and can make the welding bellows move in three directions of X, Y, and Z.

• X/Y direction adopts crossed roller and ball screw structure, which is strong and compact.
• The Z direction adopts the combined structure of the optical axis and the ball screw.
• The product is a modular product with multiple configurations to choose from.

Welcome to call for more information.
Compact XYZ Stage, 100mm Z Travel, +/-12.5mm XY Travel, CF70 Travelling Flange, CF114 Mounting Flange
SKU: SXYZ63Z100
The compact 3D translation stage is compact and provides precise motion and sample position control in ultra-high vacuum environments. The X/Y direction adopts the differential head control, and the Z direction adopts the screw to make it run more smoothly. Welded stainless steel bellows allow the NW35CF mobile flange to move within a limited range. Mounting flange optional, NW35CF or NW63CF.

• Working Pressure: 10-11 mbar~1 bar
• Manual Actuator
• Bakeable to 150℃
• Welded Bellows Seal with SS 316
• Micrometer with 10um Resolution
• Z-motion scale in 1mm increment
• Top mounting flange: CF35, tapped hole
• Bottom mounting flange: CF63, clear hole
£ 5,534.12 5534.12 GBP
Compact XYZ Stage, 150mm Z Travel, +/-12.5mm XY Travel, CF70 Travelling Flange, CF114 Mounting Flange
SKU: SXYZ63Z150
The compact 3D translation stage is compact and provides precise motion and sample position control in ultra-high vacuum environments. The X/Y direction adopts the differential head control, and the Z direction adopts the screw to make it run more smoothly. Welded stainless steel bellows allow the NW35CF mobile flange to move within a limited range. Mounting flange optional, NW35CF or NW63CF.

• Working Pressure: 10-11 mbar~1 bar
• Manual Actuator
• Bakeable to 150℃
• Welded Bellows Seal with SS 316
• Micrometer with 10um Resolution
• Z-motion scale in 1mm increment
• Top mounting flange: CF35, tapped hole
• Bottom mounting flange: CF63, clear hole
£ 5,059.76 5059.76 GBP
Compact XYZ Stage, 75mm Z Travel, +/-12.5mm XY Travel, CF70 Travelling Flange, CF114 Mounting Flange
SKU: SXYZ63Z75
The compact 3D translation stage is compact and provides precise motion and sample position control in ultra-high vacuum environments. The X/Y direction adopts the differential head control, and the Z direction adopts the screw to make it run more smoothly. Welded stainless steel bellows allow the NW35CF mobile flange to move within a limited range. Mounting flange optional, NW35CF or NW63CF.

• Working Pressure:10-11 mbar~1 bar
• Manual Actuator
• Bakeable to 150℃
• Welded Bellows Seal with SS 316
• Micrometer with 10um Resolution
• Z-motion scale in 1mm increment
• Top mounting flange: CF35, tapped hole
• Bottom mounting flange: CF63, clear hole
£ 4,392.16 4392.16 GBP

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Get in touch today to discuss your requirements, please contact us on

+44 (0) 1424 447726   sales@ultrahighvacuum.com