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UHV Distribution Chambers

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Integrated Solutions for Growth.

The UHV distribution chamber incorporates a rotary, telescopic transfer arm capable of feeding samples from one chamber to another. It is compact, cost effective and can be coupled to the reputable Vinci Linear Transfer Tunnel. Bare 3” wafers can be thus loaded in the linear tunnel and distributed to any growth or analysis system within the user facility. Vinci offers a turnkey solution to Institutes who wish to develop novel materials for the future with a budget smart and space optimised integration.

Feature:
*Rotary & Telescopic Extension

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SKU: UHV-DC
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Terms and Conditions
Shipping: Standard off-the-shelf stock items will be delivered within 3-5 working days. Non-stock and bespoke products will be advised on an individual basis.

Mounting Flange

CF100

Rotation Motion

Unlimited manual and

+/- 180° motorised

Chamber ID

650mm

Chamber Height

288mm

Volume of Chamber

65L

Arm Extension

760mm

Arm Stiffness at Full Extension

Typically <1mm deflection for 10N load

Rotational reproducibility

0.2mm at full extension

Bakeout temperature

250°C (with motors removed)

Base pressure

5 E 10-10 mbar

Compatibility

Mecatrans (transfer tunnel)


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If you require any additional information regarding this product please contact us via the form below or call us on +44 (0) 1424 447726
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