NL-FLEX Modular PVD System

Modular PVD system for Nanoparticle & Thin film; Non-planar & planar, powder coating and reel-to-reel deposition system.

The NL FLEX is an ultra-versatile PVD System capable of generating both nanoparticles and thin films that is well-suited for both industry and academic research. NL-FLEX is capable of accommodating any kind of substrates including reel-to-reel, non-planar and powder coating. Serving a wide range of applications including catalysis, photonics, energy storage, sensors, and life sciences. This modular PVD deposition system can be integrated with analytical tools to provide a fully customized solution for your research needs.

Key Features
• Generate complex materials by combining nanoparticles and thin films
• Hydrocarbon free nanoparticles using NL-UHV
• Spacious and easy access chamber, ideal for delicate and complex substrates
• Upward or downward facing source configuration
• Compatible with third party sources
• Coating of 3D objects with rotation, heating and biasing options
• Fully automated and recipe driven software

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SKU: NL-FLEX

Terms and Conditions
Shipping: Standard off-the-shelf stock items will be delivered within 3-5 working days. Non-stock and bespoke products will be advised on an individual basis.

Download Brochure

Size of deposition chamber

450 x 450 x 450 mm

Base Pressure

< 5e – 7 Torr

Orientation

Sputter down

Sample table

4-inch wafer, 20rpm rotation

Pumping

700l/s turbo with 7.2m3/hr dry backing pump

Valves

Manual valves, shutters and linear drives

Control Software

Recipe driven processes, power supply control and data logging

In-situ monitoring

Quartz Crystal Microbalance for process monitoring and end point detection

Source Port

Up to 6 deposition sources

Source Type

Nanoparticle source, Magnetron sputter sources,
Mini e-beam evaporator, Thermal boat source
K-cells, Ion source, RF Atom source

Options

Removable deposition shielding
Upward facing source geometry
Sample stage:-

– DC bias for nanoparticle acceleration

– RF bias for sample surface cleaning

– Heating to 800°C

Automation options for valves, shutters and linear drives
Adjustable baffle in front of turbo to increase dynamic pressure range for sputtering at lower gas flows
Separately pumped load-lock with transfer arm

Download Software Brochure

Intuitive "drag and drop" user interface is easy and allows full automation of the pump down and deposition sequences.

Highlights

Fully automated pump down and venting
Configure Virtual Rack to suit your process
Easy to add and remove instruments
Real Time Charting
Interlock Monitoring
Recipe Control
Data Logging Functions

Publications using Nanoparticle Technology

Fe nano-particle coatings for high temperature wear resistance Fe nano-particle coatings for high temperature wear resistance

- J.C. Walker , S.R. Saranu , A.H. Kean, R.J.K. Wood.

ZnO nanoparticles produced by novel reactive physical deposition process

- Thangadurai , I. Zergioti , S. Saranu , C. Chandrinou , Z. Yang , D. Tsoukalas , A. Kean , N. Boukos .

Effect of nitrogen on the properties of nanostructured zinc nitride heterojunction prepared by reactive magnetron sputtering

- Ali J. Addie , Mudhafar A. Mohammed , Raid A. Ismail .