NL-CUBE Compact PVD System
Compact, flexible Physical Vapor Deposition System.
The NL-Cube is a low cost, compact and flexible PVD system that offers nanoparticle deposition capability in addition to standard thin film deposition functionality in one versatile unit. There are two models: the 375 (up to five sources and substrates up to four inches in diameter) and the 300 (up to four sources and substrates up to two inches). Because of their relatively low volumes, the chambers offer rapid pump down and turnaround of around 45 minutes. The Cube is designed with three priorities in mind: cost, functionality, and reliability.
Key Features
*Available sources include magnetrons, nanoparticle, mini-e-beam, thermal boat, atom and ion sources
*Sputter-up or sputter-down configurations
*Rotation, bias, and heating up to 800ºC options
*Turnaround ~ 45 minutes
*Vacuum down to 5E-7 torr
*System chassis containing control systems, power supplies and pumps
*Integrated PC with Spectrum software allows automated process control, complex recipes and datalogging
Intuitive "drag and drop" user interface is easy and allows full automation of the pump down and deposition sequences.
Highlights
- Fully automated pump down and venting
- Configure Virtual Rack to suit your process
- Easy to add and remove instruments
- Real Time Charting
- Interlock Monitoring
- Recipe Control
- Data Logging Functions